Semicon Technologies

Spare Parts and Consumable List

Item	Model	AVIZA Part Number
1	PCB, VME TEMP A/D INPUT (SLOT 9)	602934-01
2	PCB, VME AUTO, DIGITAL INPUT (SLOT 7)	602935-02
3	PCB, VME AUTO DIGITAL OUTPUT, (SLOT 8)	602936-01
4	PCB, ANALOG I/O (VME SLOT 17)	602937-01
5	PCB, LYNX CPU (SLOT 1)	602933-02U
6	PCB, VME PROCESS ANALOG	602937-03
7	PCB, VME PROCESS ANALOG (602937-04)	602937-04
8	PCB, VME MOTION CONTROL, WTU (SLOT 4)	602938-01
9	PCB, VME WTU MOTION CONTROL, META05 ONLY	606314-02
10	PCB, VME MOTION CONTROL, MTR (SLOT 6)	602938-03
11	PCB, VME I/O TRANSITION (SLOT 2)	602940-01
12	PCB, VME PROCESS, DIGITAL OUT 1 (SLOT 1)	602941-03
13	PCB, VME PROCESS, DIGITAL OUT 2	602941-04
14	PCB, VME COUNTER, TEMP CONTROL (SLOT 16)	602939-02
15	PCB, VME PROCESS ANALOG	602937-03
16	PCB, VME MOTION CONTROL, WTU (SLOT 4)	602938-01
17	PCB, VME MOTION CONTROL, MTR (SLOT 6)	606314-03
18	PCB ASSY,PROCESS,DIG-IN	602942-02
19	PC BOARD CONFIG, LCA BD	604093-17
20	PC BOARD CONFIG, LCA BD	604093-18
21	PC BOARD CONFIG, ALARM INPUT BOARD	604095-17
22	PC BOARD CONFIG, RELAY BOARD	604096-17
23	PCB, ENVIRONMENTAL(SLOT17)(MUST BE REV7)	602700-01
24	PCB, TEMP INTERFACE	602718-03U
25	PCB, PROCESS, DIGITAL INPUT (SLOT 12)	602942-02
26	PCB, WTU I/FMOTION CONTROL (PROC SLOT 3)	603847-01
27	PCB, CBB I/F MOTION CONTROL (PROC SLOT 4	603848-01
28	PCB, DIGITAL OUTPUT (PROC SLOT 8)	603851-01
29	PCB, CONFIG, VALVE OUTPUT	604092-17
30	PCB, VALVE OUTPUT	604092-18
31	PCB, LCA	604093-18
32	PCB, CONFIG. ALARM INPUT BOARD	604095-17
33	PCB, CONFIG, ALARM INPUT BOARD	604095-18
34	PCB, CONFIG, RELAY BOARD	604096-17
35	PCB, CONFIG, RELAY BOARD	604096-18
36	PCB, CONFIG, ANALOG ATM	604097-17
37	PCB, CONFIG, ANALOG ATM BOARD	604097-18
38	PCB, ATM ANALOG ADJUST, SLOT 18	604097-20
39	PCB, ANALOG INTERFACE	604099-17
40	PCB, ANAL INTF	604099-18
41	PCB, VALVE OUTPUT, ANNEAL	604102-08
42	PCB, CONFIG, LCA BOARD, ANNEAL	604103-08
43	PCB, CONFIG, ALARM INPUT ANNEAL	604105-03
44	PCB, RELAY, ANNEAL	604106-03
45	PCB, CONFIG, ANALOG ATM ANNEAL	604107-08
46	PCB, CONFIG, INTERFACE, ANNEAL	604019-08
47	PCB, WTU I/FMOTION CONTROL (PROC SLOT 3)	603847-01
48	PCB, LCA (WetOx tools)	604093-20
49	PCB, TEMP INTERFACE	602718-03U
50	PCB, WTU I/FMOTION CONTROL (PROC SLOT 3)	603847-01
51	PCB, ATM ANALOG ADJUST, SLOT 18	604097-20U
52	PCB VALVE OUTPUT BD. VACUUM ANN	606801-02
53	PCB ALARM INPUT BD. VACUUM ANN	606806-02
54	PCB RELAY BD. VACUUM ANN	606807-02
55	PCB ANALOG CVD INTERFACE BD. VACUUM ANN	605539-02
56	ANALOG CVD BD. VACCUM ANNEAL	604968-03
57	GALIL PCB DMC530 1	602933-01
58	PCB, ALARM INTERFACE	165120-001
59	PCB, ANALOG INTERFACE	165200-001
60	PCB, SSR FIRING CARD	165990-001
61	PCB, EXTENSION	168030-001
62	PCB, VALVE OUTPUT	168120-001
63	PCB, LCA BOARD	168130-002
64	PCB, RELAY, SLOT 13	168150-001
65	ANALOG ATM PROCESS	168160-002
66	ANALOG CVD	168180-001
67	PCB, CONFIG, TEMP INTERFACE ATM	16815-013
68	PCB,CONFIG, TEMP INTERFACE ATM	168615-014
69	PCB, 5V LOOP	169580-001
70	PCB, VALVE INTERFACE	165110-001
71	PCB, EXTENSION, STRAIGHT	165220-001
72	PCB, 5V LOOP	169580-001
73	DIGITAL OUTPUT INTERFACE	168090-001
74	BACKPLANE, PROCESS CARDCAGE, PCB	168800-001
75	ALARM INPUT PCB PROCESS	168140-001
76	PCB, DIGITAL INPUT (PROCESS SLOT 6)	170800-001
77	PCB, EMO	173020-002
78	PCB, CASSETTE SENSOR	170700-001
79	PCB, CONFIG. LCA	4014527
80	PCB ANALOG ATM BD WITH NH3	2022478
81	PCB VALVE OUTPUT BD WITH NH3	2022476
82	PCB ALRM INPUT BD WITH NH3	2022477
83	PCB ANALOG INTERFACE BD WITH NH3	2022993
84	MOTOR DRIVE ASSY,THETA,AVP	603144-01
85	MOTOR ASSY, BHU	778006-001
86	MOTOR DRIVE ASSY, BHU	603144-01U
87	FLOWSWITCH, +24VDC, SPDT	750021-001
88	FLOWSWITCH, +24VDC,SPDT	750021-002
89	SENSOR,IR,D-5VDC,0-1000 DEGREE FAH.	909268-003
90	SENSOR ASSY, THETA AXIS, BHU	602715-01
91	SENSOR ASSY, Z AXIS	602716-01
92	SENSOR, H2 SPARE (HOCKY PUCK)	907882-002
93	IR SENSOR & BOARD	909268-004
94	GASKET, OUTER, CSU DOOR	109110-01
95	GASKET, INNER, CSU DOOR	109111-01
96	WAFER ALIGNMENT SENSOR, RECEIVER 1 & 2	604194-01
97	WAFER ALIGNMENT SENSOR, EMITTER 1 & 2	604195-02
98	WAFER COUNTER	604261-02
99	AMPLIFIER MODULE, WAFER BEAM	1-909242-001
100	SERVO AMP, AUTOMATION	908736-002
101	CSU DRIVE ASSY	602668-04
102	CSU DRIVE (MOTOR ONLY)	410619-001
103	EMIT ASSY, WAFER OUT	604248-01
104	EMITTER, WAFER OUT OF PLACE	739686-001
105	SHUTTER ASSY, MOTOR	603030-02
106	SHUTTER MOTOR ASSY, CVD	108026-02
107	ASSY, SHUTTER LIMIT SENSORS	604421-01
108	BELT, SHUTTER	908656-001
109	END EFFECTOR (AVP DIFF)	604242-01
110	FILTER,END EFFECTOR	778129-001
111	DISK,HARMONIC DRIVE, BHU	107456-01
112	TURNBUCKLE ASSY	107457-01
113	CRANKARM, THETA AXIS	107466-01
114	RECVR ASSY, WAFER OUT	604249-01
115	WTU,IFR REBUILT	4015515
116	CABLE, MFC	603797-01
117	CABLE, CSU	604183-01
118	POWER SUPPLY, MULTI OUTPUT	908749-002
119	POWER SUPPLY, SIGNAL CONDITIONER	705174-001
120	POWER SUPPLY, MULTI OUTPUT	908749-001
121	SPARE VME POWER SUPPLY(SLOTS 19,20,21)	909159-001
122	02 AMPLIFIER (HOCKEY PUCK)	910095-002
123	SERVO AMP,AUTOMATION	908736-002
124	HRNS, TEMP A/D INPUT 1	603230-01
125	HRNS, MANOMETER	603252-04
126	PTI VALVE SENTRY 1510	909441-002
127	PTI SUPERVISOR CONTROLLER , SENTRY 1510	909442-001
128	PTI CONDENSER	910576-003
129	HARD DRIVE, SPARC 5, 2.5.1 PATCH 'O', SU	2019909-001
130	HARD DRIVE, ULTRA 5, 2.5.1 PATCH 'O', SU	605160-03
131	DIGITAL OUT VME REV2 S10	630030-01
132	DIGITAL IN PROCESS	630020-01
133	DIGITAL OUT PROCESS	168090-005
134	DIGITAL OUT PROCESS	630010-01
135	DIGITAL OUT PROCESS	168090-004
136	ANALOG CVD	605758-01
137	ANALOG I/O	VME 4512
138	HARNESS ASSY, CASSETTE EMMITTER/RECEIVER	604185-01
139	HARNESS ASSY AUTO BHU LIMIT SW	603623-08
140	SEAL, REAR DOOR	108852-01
141	SEAL,FACE,AVP	105640-02
142	IGNITER	901554-001
143	FLOWMETER, WATER, 25 SLPM	907487-002
144	A/D FILTER ASSY	602423-01
145	MODULE, SIGNAL CONDITIONER, T/C	702574-001
146	MONITOR, TEMP, 6 CHANNEL R TYPE	739736-001
147	CONTROL, FLAME 8 SEC DELAY	906718-002
148	WORKSTATION, SUN ULTRA 5, 8.3 GB	908431-007
149	RVP TEMP I/F	610013-01
150	GASTECH HCL	24-0274
151	SELANT,URETHANE	739947-003
152	RETROFIT KIT, AUTO MTR/BRKE CBL STRAIN RELIEF	606765-01A
153	ADHESIVE LOCTITE
154	955 POWER SUPPLY 5VDC/1000MA