Uniformity Energy Applied to Substrate
Easy Integration into Existing Tools
Standard and Custom Designs
U.S. Referenced Patents
6,188,162 – High Power Megasonic Transducer
6,222,305 – Chemically Inert Megasonic Transducers
6,431,908 – Method for Spring Contact & Matching Megasonic Transducers
6,549,860 – Method and Apparatus for Tuning a Megasonic Transducers
6,791,242 – Radial Power Megasonic Transducer
6,882,087 – Uniform Energy Megasonic Transducer Using Vessel as Resonator
6,904,921 – Indium or Tin Bonded Megasonic Transducer Systems
6,946,774 – Segmented Uniform Energy Megasonic Transducer
7,141,917 – Wedge Shaped Uniform Energy Megasonics Transducer >2MHz
7,145,286 – Indium or Tin Bonded Transducers >2MHz
Foreign Referenced Patents
162149 – Chemically Inert Megasonic Transducers – Taiwan
200216 – radial Power Megasonic Transducer - Taiwan
200200844-9 – Chemically Inert Megasonic Transducers – Singapore
200402092-1 – Radial Power Megasonic Transducer - Singapore
10-0681071 – Chemically Inert Megasonic Transducers - Korea
Mounted above a rotating substrate, the MegPie provides a uniform field of acoustic energy through a fluid to achieve consistent cleaning without damage.
| Mechanical |
| Easy to integrate & install on customer platforms |
| Wide acoustic tolerance for mechanical run out of substrate. |
| Wide array of materials and coatings available ( Aluminum, 316L SS, Ceramic, Quartz, PFA, PVDF, ETFE, ECTFE and more) |
| Custom configurations available |
| Process |
| Uniform direct acoustic field for damage-free processing |
| Cleaning and Sonochemical applications |
| Pulsed wave or Continuous wave acoustics |
| Control and interface through ProSys MicroDuo advanced electronics |
| Acoustic Uniformity and Performance |
| Transducer shape gives uniform power distribution on rotating substrates |
| Power density: Up to 3 watts per square centimeter |
| Reduced acoustic attenuation by trapped gasses |
| More electrically stable than strip or full plate transducers |
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